RADIATION SENSITIVE MATERIAL

摘要

PURPOSE:To improve sensitivity of an inorg. resist composed of a condensed tungstic acid by incorporating the condensed acid contd. at least one kinds of tungsten, niobium and titanium to the titled material. CONSTITUTION:A part of the tungsten atoms of the condensed tungstic acid is substituted with niobium (Nb) and/or titanium (Ti). Said condensed acid is obtd. by reacting hydrogen peroxide to mixtures of metal tungsten (or tungsten carbide) powders and niobium carbide (or metal niobium) powders and/or titanuim carbide (or metal titanium) powders. The sensitivity against UV ray, electron ray or X ray is improved by adding niobium and/or titanium to the titled material.