| 摘要 |
PURPOSE:To obtain trichlorosilane with increased capacity for treating SiCl4 per unit volume in good yield by allowing SiCl4 and metallic Si to react with H2 in the presence of metal Cu and an acidic compd. CONSTITUTION:Trichlorosilane is prepd. by the reaction of SiCl4 and metallic Si with H2 or H2 plus HCl in the presence of metal Cu and an acidic compd. Suitable acidic compds. are fluorides, chlorides, bromides, or iodides of Ga, Zr, Hf, Sb, Nb, Ta, Mo, In, W, Re, Zn, As, B, P, Ti, Pt or Be, or aprotic acidic compds. such as acidic metal oxides or acidic metal sulfides, etc. The reaction may be carried out under normal pressure, elevated pressure or reduced pressure, but it is preferred to be carried out under elevated pressure from the view points with regard to reaction equilibrium and treating capacity of raw materials.
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