| 摘要 |
PURPOSE:To stably and efficiently obtain a magnetic thin film minimal in impurity content and having superior characteristics, by incorporating specific amounts of Al, Ca, Mg, etc., to an Ni-Fe-base alloy for vapor deposition containing Mo, Cr, Cu, and Nb. CONSTITUTION:The Ni-Fe-base alloy for vapor deposition has a composition consisting of, by weight, 35-85% Ni, 3-15% of one or more elements among Mo, Cr, Cu, and Nb, <=1% Al, <=300ppm Ca and Mg, <=300ppm O, <=30ppm N, and the balance essentially Fe and further containing, if necessary, <=1% Ti. In this alloy, impurity content is minimized and, owing to gettering action by Ca and Mg and by Al and Ti, gas components in a vapor deposition atmosphere can be reduced. Accordingly, the magnetic thin film having high purity and superior characteristics can be obtained. This alloy is useful as vapor deposition material for manufacturing thin film of high magnetic permeability material.
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