| 摘要 |
PURPOSE:To perform temperature control over a scale base with fluid by providing a scale device with a fluid passage where the fluid which controls the temperature of the scale base flows. CONSTITUTION:The fluid which is brought under temperature control to specific temperature is supplied from a fluid intake 14a, passed through the fluid passage 13, and discharged from a fluid outlet 14b. Consequently, the scale substrate 11 is heated or cooled to the fluid temperature and displaced thermally as specified. When the scale device is used principally to correct the thermal displacement of a mechanical structure, the fluid which is controlled to constant temperature is supplied to maintain the quantity of thermal displacement of the scale base 11 at a specific value. In another way, the temperature of the fluid is controlled in proportion to the temperature of the mechanical structure and supplied so as to correspond to the thermal displacement of the mechanical structure. The control over the fluid temperature like this is easily performed by using a fluid temperature controller equipped with a heater, a thermistor, etc.
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