| 摘要 |
PURPOSE:To eliminate variance in the film thickness of a resin layer and to uniform sensor characteristics by controlling the thickness of a rubber type silicone resin layer formed by injecting photosetting silicone resin and projecting a proper quantity of an ultraviolet ray in a short wavelength range. CONSTITUTION:A case 1 is a holding structure part and a silicone diaphragm 3 which is held airtight under a vacuum is provided to a base 4; and it is made conductive to an external circuit through an electrode 2 penetrating the case 1 and a vacuum airtight chamber 8 is formed at the lower part. External pressure P is applied to the silicone diaphragm 3 through the rubber type set silicone resin layer 10 which is set with a ultraviolet ray in the photosetting silicone resin in a pressure lead-in hole 9 and an incompletely set silicone resin layer 11 which is not set completely, so that the pressure is transduced into an electric signal. A proper quantity of the ultraviolet ray is projected uniformly from above the pressure lead-in hole 9 to form the rubber type set silicone resin layer 10 with desired film thickness, and the incompletely set silicone resin layer 11 is formed under it.
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