发明名称 MATERIAL FOR FORMATION OF PORES
摘要 PURPOSE:To obtain a material for formation of pores which allows fine and highly precise pores to be formed in a ceramics by using a photo-polymerization photosensitive resin as a photosensitive resin for formation of a pattern. CONSTITUTION:A ceramic green sheet in which a pattern of highly precise pores has been formed using a photosensitive resin and another ceramic green sheet are laminated, thermally compressed and backed. This manufacturing method which forms pores in a ceramic base uses a material for formation of pores which is mainly composed of photo-polymerization photosensitive resin as a photosensitive resin. As materials for formation of pores consisting mainly of photo-polymerization photosensitive resin, photosensitive resins containing photo-polymerization oligomer or photo-polymerization monomer and photo-polymerization initiator or photosensitive resins containing photo-polymerization oligomer or photo-polymerization monomer and a high polymer such as bonding agent and photo-polymerization initiator are available. Since a pattern of pores is formed by using a photosensitive resin, it is possible to form a pattern of very fine pores with high precision.
申请公布号 JPS6399955(A) 申请公布日期 1988.05.02
申请号 JP19860186424 申请日期 1986.08.07
申请人 NEC CORP;TOKYO OHKA KOGYO CO LTD 发明人 UCHIUMI KAZUAKI;TAKAMIZAWA HIDEO;HORI BUNICHI;ISHIDA YUKIO
分类号 H01L41/22;B41J2/135;B41J2/14;B41J2/16 主分类号 H01L41/22
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