发明名称 |
MATERIAL FOR FORMATION OF PORES |
摘要 |
PURPOSE:To obtain a material for formation of pores which allows fine and highly precise pores to be formed in a ceramics by using a photo-polymerization photosensitive resin as a photosensitive resin for formation of a pattern. CONSTITUTION:A ceramic green sheet in which a pattern of highly precise pores has been formed using a photosensitive resin and another ceramic green sheet are laminated, thermally compressed and backed. This manufacturing method which forms pores in a ceramic base uses a material for formation of pores which is mainly composed of photo-polymerization photosensitive resin as a photosensitive resin. As materials for formation of pores consisting mainly of photo-polymerization photosensitive resin, photosensitive resins containing photo-polymerization oligomer or photo-polymerization monomer and photo-polymerization initiator or photosensitive resins containing photo-polymerization oligomer or photo-polymerization monomer and a high polymer such as bonding agent and photo-polymerization initiator are available. Since a pattern of pores is formed by using a photosensitive resin, it is possible to form a pattern of very fine pores with high precision. |
申请公布号 |
JPS6399955(A) |
申请公布日期 |
1988.05.02 |
申请号 |
JP19860186424 |
申请日期 |
1986.08.07 |
申请人 |
NEC CORP;TOKYO OHKA KOGYO CO LTD |
发明人 |
UCHIUMI KAZUAKI;TAKAMIZAWA HIDEO;HORI BUNICHI;ISHIDA YUKIO |
分类号 |
H01L41/22;B41J2/135;B41J2/14;B41J2/16 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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