| 摘要 |
PURPOSE:To measure flatness and glossiness simultaneously in a short time by extracting the pitch and contrast of light and dark from the photoelectric conversion signal at the same place of a mounted sample surface to be measured and finding the flatness and glossiness from them. CONSTITUTION:Light beams from a light source 2 are converged to illuminate a grating 6 with a uniform intensity distribution and transmitted light beams from the grating 6 are passed through a lens 8, mirrors 9-11, and the sample surface 13 to form an image on a CCD 15, thereby obtaining a real image of the grating 6. The photoelectric conversion signal of the CCD 15 is A/D- converted 18 and stored in a memory 19. When a measurement switch 23 is pressed, a CPU 21 stores grating image data on the sample surface 13 to be measured in the memory 19, then extracts respective peak points corresponding to shade parts, and extracts respective pitches Pi of the data waveform. The pitch data is displayed as the flatness of the surface 13 on a display device 22 by operating standard deviation delta by using an equation I and the contrast C at the corresponding sample surface place is operated from voltages at the respective peak points and bottom points by using an equation II and converted into the glossiness, which is supplied to the display device 22.
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