MOISTURE SENSITIVE VITREOUS MATERIAL

摘要

PURPOSE:To develop an element for a humidity sensor accurately measuring humidity in the atmosphere by melting a mixed raw material contg. V2O5, Nb2O5, Li2O and ZnO at the specified ratio and thereafter ultraquenching the melt and molding it into a glassy thin film. CONSTITUTION:A mixed raw material having 10-70mol% V2O5, 10-75mol% Nb2O5, 10-50mol% Li2O and 0-60mol% ZnO as a component range is heated and melted in a platinum crucible and the melt is jetted on a metallic rotary roll for quenching which is rotated at high velocity of 300rpm and a glassy thin film of 20-50mum thickness is formed on the roll. This glassy thin film has excellent performance as an element for a humidity sensor which accurately measures humidity in the atmosphere by adsorbing moisture content contained in the atmosphere on the surface thereof and sensing it as the change of electric resistance valve.