| 摘要 |
PURPOSE:To accurately measure humidity without any influence of atmospheric pressure by correcting the output of a 1st silicone diaphragm where a humidity- sensitive expansible film is adhered with the output of a 2nd diaphragm. CONSTITUTION:The 1st and 2nd silicone diaphragms 3 and 3' are formed on a sensor pellet 1 and provided with the 1st and the 2nd piezoelectric resistance areas 4a-4d and 4'a-4'd which transduce strain quantities into electric quantities. The humidity-sensitive expansible bodies 9 are adhered on the reverse surface of the 1st silicone diaphragms 3. 1st and 2nd opening 20 and 20' corresponding to the 1st and the 2nd silicone diaphragms 3 and 3' are provided to a header 6. 1st and 2nd converting means 30 and 31 are composed of bridge circuits respectively and a correcting means 32 outputs the difference between the outputs of both means 30 and 31. The output of the means 30 contains information on humidity and atmospheric pressure, but the output of the means 31 contains only the atmospheric pressure, so the difference indicates only the humidity.
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