| 摘要 |
PURPOSE:To improve the chipping resistance and wear resistance as well as sliding characteristic of a substrate by adding specific ratios of >=two kinds among Al2O3, Nb2O5 and TiO2 to an essential component consisting of prescribed ratios of ZrO2 and Y2O3. CONSTITUTION:This ceramic substrate is formed by adding a sintering assistant consisting of >=two kinds among 1-20wt% Al2O3, 1-10wt% Nb2O5 and 1-10wt% TiO2 to the essential component consisting of 80-94mol% ZrO2 and 6-20mol% Y2O3. A sintered body is constituted of the two-phase mixed structure of a tetragonal crystal and cubic crystal or single structure of the cubic crystal. The substrate is preferably produced by hot-pressing a mixed molding composed of the above-mentioned materials at 1,250-1,600 deg.C or presintering the molding in the atm. at 1,250-1,700 deg.C, then subjecting the molding to hot isostatic pressing at 1,200-1,500 deg.C. The substrate which has no pores on the surface and has the excellent chipping resistance, wear resistance and sliding characteristic is thereby obtd. |
