DEVICE FOR PULLING UP SINGLE CRYSTAL

摘要

PURPOSE:To control easily the temp. in a vertical direction to a prescribed temp. distribution by using two-stage heaters which are divided to upper and lower heaters for the heater in the furnace on the side face of a device for pulling up a single crystal by a Czochralski method and consisting each heater of a rectangular waveform coil of which the transverse direction is made vertical. CONSTITUTION:A heater in the furnace on the side face of a device for pulling up a single crystal 7 by a Czochralski method is divided to upper and lower heaters in a part on the side face of a crucible 3. More specifically, the heater is divided to two stages; an upper heater 11 and a lower heater 12. The heater 11 consists of a cylindrical rectangular waveform coil 13 wound along the outside on the side face of the crucible 3 and the heater 12 consists of a funnel- shaped rectangular waveform coil 16 wound along the outside on the side face and base of the crucible 3.