| 摘要 |
<p>PURPOSE:To obtain a column having a surface suitable for liquid phase coating, by constituting a capillary tube of a silicon wafer of which the surface is oxidized to SiO2 and a hard glass plate. CONSTITUTION:A column groove pattern is formed on a silicon wafer by etching. Next, after SiO2 on the wafer is removed, an SiO2-layer having a thickness of about 0.1mum is formed on the surface of the silicon wafer by thermal oxidation. This silicon wafer and a hard glass plate optically polished are closely contacted with each other and, by applying the voltage of -1kV to the glass part while the silicon part is earthed at 350 deg.C, both of them are electrostatically adhered. After a column connector is mounted, a liquid phase agent of the dimethylsilicone family is applied. By this method, a high performance column having good separation capacity can be obtained.</p> |
