Apparatus for applying coatings in a vacuum by magnetron atomisation

摘要

An apparatus for applying coatings in a vacuum by magnetron atomisation, in which the magnetron system (1) is rigidly connected to an earthed shielding tube (2), to an insulating tube (3), to a current-carrying tube (4) and to an inner tube (5) which are arranged successively one in the other, the current-carrying tube (4) and the inner tube (5) constituting the system for supplying the cooling fluid. Arranged in the space limited by the shielding tube (2) and by the insulating tube (3) are a tube (9) for the passage of working gas and an electrical lead (10) to the anode. The shielding tube (2) and the current-carrying tube (4) are insulated electrically from one another and are sealed off in a vacuum-tight manner. The shielding tube (2) opens out in the vacuum space through a sluice device and makes the connection between the magnetron system (1) and the drive. <IMAGE>