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发明名称
MANUFACTRE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6398148(A)
申请公布日期
1988.04.28
申请号
JP19860245041
申请日期
1986.10.14
申请人
FUJITSU LTD
发明人
SUZUKI KUNIHIRO
分类号
H01L21/225;H01L21/331;H01L29/72;H01L29/73
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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