| 摘要 |
<p>PURPOSE:To enable foreign substances attached to the reverse face of a wafer to be removed through charging them before they are attracted by providing, on the No.1 belt, a charging means which makes the wafer as one electrode, and then providing, on the No.2 belt, an electrostatic field generating means which makes the wafer as another electrode. CONSTITUTION:On the under side of an electrically conductive belt 24 in the No.1 belt conveying mechanism 20 is provided a charging means 40 which makes a wafer 16 as one electrode and charges it to be negative, and then, on the under side of an electrically conductive belt 34 in the No.2 belt conveying mechanism 30 is provided an electrostatic field generating means 50 which makes the wafer 16 as another electrode and generates an electrostatic field between it and the wafer 16. And further, pulleys 22, 32 are made from an electrically conductive material, and grounded respectively. Hereby, foreign substances attached to the reverse face of the wafer 16, which have been electrified to be negative in the No.1 belt conveying mechanism 20, are attracted by the electrostatic field within the No.2 belt conveying mechanism 30 so that they are removed.</p> |
