| 摘要 |
PURPOSE:To prevent the occurrence of pitching motion in micro position adjustment by so arranging a plurality of adsorption plates on a cross guide as to adsorb different surfaces to be adsorbed in parallel with each other and canceling pitching forces on the cross guide through such arrangement. CONSTITUTION:A micro locking mechanism 7 is so formed that each adsorption plate 71/is opposed to an adsorbed surface 61 as the perpendicular plane of a travel guide 6. The adsorption plate 71 is fitted with an elastic material 73 having a parallel spring 72, and this elastic material 73 is fitted to the vertical face of an L-shaped component 31, while the adsorption plate 71 is made continuous to an adsorbing source via an air inlet and an air pipe. Then, after each adsorption plate 71 of a cross guide is adsorption fixed to the external vertical side of the travel guide 6, an outside force 'f' is given by a linear motor. In this case, the pitching directions of 74 and 74 of the adsorption plate 71 are opposed to and cancel each other. Consequently, no pitching motion appears, thereby enabling the micro adjustment of the cross guide and improving X and Y stage characteristics. |
