发明名称 |
Process for fault detection on defined structures |
摘要 |
The invention relates to a process for fault detection on structures on surfaces of electrical components or the auxiliary means required to manufacture these components, wherein the actual structure provided in each respective case is scanned with a test beam. In accordance with the invention, provision is made for structure faults or structure deviations to be directly ascertained from sequences of picture points within the scope of an ordinate scanning.
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申请公布号 |
US4741044(A) |
申请公布日期 |
1988.04.26 |
申请号 |
US19850758809 |
申请日期 |
1985.07.25 |
申请人 |
TELEFUNKEN ELECTRONIC GMBH |
发明人 |
POLOMSKY, HORST;JAEGER, ROLF |
分类号 |
G01N21/956;G06T7/00;(IPC1-7):G06K9/46 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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