发明名称 Apparatus for producing coils from films of insulating material, conductively coated in a vacuum
摘要 A method and apparatus are disclosed for producing rolls or coils of film of insulating material which has been conductively coated, in a vacuum, by vaporizing conductive material in direct electron beam bombardment and condensing the vapor on the film surface. According to the invention, the film is subjected to a plasma treatment after coating and before the film is wound in a coil.
申请公布号 US4740385(A) 申请公布日期 1988.04.26
申请号 US19870019072 申请日期 1987.02.26
申请人 LEYBOLD-HERAEUS GMBH 发明人 FEUERSTEIN, ALBERT;EBERHARDT, HELMUT;LAEMMERMANN, HELMUT;BAUER, VOLKER;LOEBIG, GERALD
分类号 C23C14/20;C23C14/56;C23C14/58;(IPC1-7):B05D3/06 主分类号 C23C14/20
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