发明名称 |
Apparatus for producing coils from films of insulating material, conductively coated in a vacuum |
摘要 |
A method and apparatus are disclosed for producing rolls or coils of film of insulating material which has been conductively coated, in a vacuum, by vaporizing conductive material in direct electron beam bombardment and condensing the vapor on the film surface. According to the invention, the film is subjected to a plasma treatment after coating and before the film is wound in a coil.
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申请公布号 |
US4740385(A) |
申请公布日期 |
1988.04.26 |
申请号 |
US19870019072 |
申请日期 |
1987.02.26 |
申请人 |
LEYBOLD-HERAEUS GMBH |
发明人 |
FEUERSTEIN, ALBERT;EBERHARDT, HELMUT;LAEMMERMANN, HELMUT;BAUER, VOLKER;LOEBIG, GERALD |
分类号 |
C23C14/20;C23C14/56;C23C14/58;(IPC1-7):B05D3/06 |
主分类号 |
C23C14/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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