Apparatus and method for cleaning a lens system

摘要

An apparatus and method for cleaning a lens system utilizes a rotating turntable that sequentially moves a plurality of lenses parallel to a shielding plate from a preexposed position to an exposed position located adjacent an aperture in the shielding plate. The apparatus includes a first manifold for directing a first flow of gas across a surface of a lens located at the preexposed position, and a second manifold for directing a second flow of gas across a surface of a lens located at the exposed position. First and second vacuum nozzles remove, respectively, airborne particles within the first and second gas flows. An additional nozzle mounted adjacent the aperture provides an ionized gas.