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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6395632(A)
申请公布日期
1988.04.26
申请号
JP19860241661
申请日期
1986.10.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
URAKAWA KAZUYA
分类号
H01L21/52;H01L21/331;H01L23/04;H01L29/72;H01L29/73;H01L29/74
主分类号
H01L21/52
代理机构
代理人
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