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发明名称
VAPOR-DEPOSITING METHOD
摘要
申请公布号
JPS6393853(A)
申请公布日期
1988.04.25
申请号
JP19860237356
申请日期
1986.10.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAKATANI MITSUNARI
分类号
C23C14/02;C23C14/30
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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