发明名称 APPARATUS FOR MEASURING EXHAUST FLOW AMOUNT USING BURETTE
摘要 PURPOSE:To perform measurement in such a state that a burette is fixed, in an exhaust flow amount measuring apparatus using the burette, by allowing the liquid surface in a liquid container to follow the movement of the liquid surface in the burette. CONSTITUTION:The liquid in the burette 7 connected to a gas flow system 6 rises through the burette 7 along the inner wall thereof by evacuation due to a vacuum pump. At this time, a liquid sump container 12 is pressed and deformed to raise the liquid surface of a liquid container 8 so as to allow the same to coincide with the liquid surface in the burette 7. A liquid sensor 19 detects moments when a measuring liquid passes the start and final positions of the measuring length section set to the burette 7 to apply the same to an operator 18. The operator 18 calculates the time required in the passage of the measuring liquid through the measuring length section to calculate the flow amount of gas on the basis of a predetermined formula. As mentioned above, by performing measurement in such a state that the burette is fixed, the generation of the leakage and damage at the connection part of the burette and the gas flow system can be prevented.
申请公布号 JPS62182624(A) 申请公布日期 1987.08.11
申请号 JP19860024480 申请日期 1986.02.06
申请人 ANELVA CORP 发明人 YOKOYAMA SHUICHI
分类号 G01F3/36;G01F1/00;G01F1/34;G01F11/28 主分类号 G01F3/36
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