MANUFACTURE OF SINGLE CRYSTAL GE THIN FILM,申请号JP19860240867-传众专利搜索

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发明名称	MANUFACTURE OF SINGLE CRYSTAL GE THIN FILM
摘要
申请公布号	JPS6394619(A)	申请公布日期	1988.04.25
申请号	JP19860240867	申请日期	1986.10.09
申请人	MITSUBISHI ELECTRIC CORP	发明人	MITSUI KOTARO;KATO MARI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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