METHOD FOR ETCHING SINGLE CRYSTAL SUBSTRATE HAVING (100) FACE,申请号JP19860198144-传众专利搜索

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发明名称	METHOD FOR ETCHING SINGLE CRYSTAL SUBSTRATE HAVING (100) FACE
摘要
申请公布号	JPS6393880(A)	申请公布日期	1988.04.25
申请号	JP19860198144	申请日期	1986.08.26
申请人	OKI ELECTRIC IND CO LTD	发明人	HORIO TAKUJI
分类号	C23F4/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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