| 摘要 |
<p>PURPOSE:To correctly match with a layout chart for each of multiple samples of the same structure by matching the coordinates of a coordinate digitizer with the coordinates of a multiple-sample stage independently and selectively. CONSTITUTION:Multiple samples 4a, 4b are mounted on a sample stage 1 within a movable range, and a control unit 5 moves the sample stage 1 to an optional position by driving pulse motors 2, 3 by the number of required pulses using the mechanical origin position S (0, 0) of the sample stage 1 as a reference. When an optional position is indicated by a stylus pen 7 having a metal tip, a coordinate digitizer 6 outputs the distance from the origin position D (0, 0) to this position. Multiple different coordinate positions on the sample bed 1 are matched with the coordinate position on a coordinate indicating means independently and correctably.</p> |
