| 摘要 |
PURPOSE:To make it easy to find the value of the magnetic field and the electric field for the ion type to be selected, and improve the operational property of ion type selection, by giving a scanning signal of sawteeth form to electric fields of an E X B mass separator to detect the beam current on the optical axis, and displaying the mass spectrum and the scanning width on a CRT. CONSTITUTION:A voltage is applied to electric field electrodes 21 and 21', and a current is applied to the exciting coil wound on magnetic field cores 22 and 22, to produce an electric field E and a magnetic field B, and the ion beams are separated by an E X B mass separator respectively. Furthermore, since the increasing sawteeth-form waves are superposed on the electric field electrodes 21 and 21', the ion beams passing through an aperture 23 are converted gradually from X1 to X2 X3, detected by a beam detector 35, and applied to the CRT 37. On the other hand, the output from a scanning signal generator 31 is applied to a lateral axis electrode, and since the synchronization is secured, the still image of the mass spectrum is obtained on the CRT 37. Therefore, the scanning width of the electric field can be found and the operational property of the ion type selection can be improved broadly.
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