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发明名称
METHOD FOR CONTROLLING AUTOMATIC OPERATION SEQUENCE OF THIN FILM FORMING DEVICE
摘要
申请公布号
JPS6393864(A)
申请公布日期
1988.04.25
申请号
JP19860237868
申请日期
1986.10.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITO HIROMOTO
分类号
C23C14/54;C23C14/32
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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