| 摘要 |
PURPOSE:To realize a low cost composition of IC system and at the same time, prevent micor-particles attached to a cassette from being carried into a hood by composing an IC wafer housed in a container so that it is directly movable between the container and the hood. CONSTITUTION:This system is composed by providing a cassette port 1, a hood 2 as well as a wafer operating mechanism 11. The port 1 comprises a container 6, an interface 8 as well as an interface operating mechanism 4 and the interface 8 is constructed by a door 5 of the cassette port 1, a door 7 of the container 6 to which the door 5 links, and others. It is necessary for the opening of the interface to compress a piston 18 and make the doors 5 and 7 move in a space 2' as an integrated device with the aid of the mechanism 4. Thus, the mechanism 11 can carry a wafer 9 in the space 2' and at the same time, particles attached to the surfaces of doors 5 and 7 are caught and this approach helps prevent ambient air containing the micro-particles from making an entry into the hood. Then, such a configuration eliminates the need for making a vessel double walled and simplifies a composition of the system.
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