| 摘要 |
PURPOSE:To obtain a parabolic mirror optical system for laser beam processing which facilitates optical axis adjustment and is small in size by mounting a parabolic mirror to a curved receiving jig having a cooling layer and providing an adjusting means which can rotate the mirror biaxially and around the optical axis thereto. CONSTITUTION:A matching face 1 with a processing machine and the surface of a plane bearing receiving flange 2 are finished within 45 deg.+ or -0.05 angular accuracy to facilitate the optical path adjustment. The plane mirror 4 is housed in a unit integrated with the parabolic mirror 6 to reduce the size. The need for adjusting the angle of the plane mirror 4 is thereby eliminated. The processing result of good reproducibility is obtd. at the time of mounting and dismounting the entire parabolic mirror optical system for processing if the angle of the parabolic mirror 6 is adjusted by using an angle adjusting screw 5. A pipe 10 for inlet of a processing gas is mounted to a torch 12 so as to face the top end of the nozzle and the splashes returning to the parabolic mirror 6 through the torch 12 from a nozzle 13 are suppressed by the pressure of the processing gas. Another inlet for the processing gas is provided in order to entirely prevent the directivity of the processing. An annular nozzle for emitting the processing gas is mounted to a work. |
