| 摘要 |
PURPOSE:To correct the optical position of a processing lens and to maintain specified laser beam processing conditions by disposing an object to be detected to the position apart from the processing lens by the distance longer than that from the position of a work to which a laser beam is projected. CONSTITUTION:The laser beam is projected to the object 16 to be inspected and the condition of the heat lens effect of the processing lens 2 is judged at the time of starting laser beam processing or during the course of the laser beam processing. The distance between the work to which the laser beam is projected and the processing lens 2 is adjusted by a means for adjusting the position of the processing lens consisting of a rack 9 fixed to a sliding cylinder part 7, a pinion gear 10, a servo motor 12, etc. according to the condition of the heat lens effect. The relation in the optical position between the work and the lens 2 is thereby maintained always constant even if the heat lens effect arises. |
