| 摘要 |
PURPOSE:To perform the cleaning of a conveyance part which is performed by an operator himself or herself before automatically in a short time by arranging conduits for rack cleaning at the conveyance part, and supplying cleaning water and removing processing liquid sticking on a rack. CONSTITUTION:The conduit 42a is arranged nearby a guide plate 40a and a roller couple 36, and plural small holes 44 are formed at the outer peripheral part of the conduit 42a while directed to the guide plate 40a and roller coupler 36. The other conduit 42b is provided nearby a guide plate 40b and the roller couple 36, plural small holes 46 are formed while directed to the guide plate 40b and roller couple 36, and the conduits 42a and 42b are coupled with cleaning water supply piping to a washing part 64 through an electromagnetic valve which is not shown to spout part of film cleaning water from small holes 46 selectively. Further, conduits 62a and 62b are constituted similarly to the conduits 42 and 42b.
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