发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To cut down the cost of bonding material remarkably by eliminating the consumption of gold as bonding material by a method wherein the rear surface of a semiconductor element is brought into ohmic contact to be bonded only to a lead base solder material for bonding process. CONSTITUTION:An Ni 2 bonded to the surface of a silicon wafer 1 is sintered at relatively high temperature to form a nickel silicide layer 3 making the Ni 2 as a collector layer ohmic. A lead base solder material 4 as a bonding material is bonded onto the Ni 2. When a separated silicon element 7 with the rear surface thereof solder bonded is mounted on a leadframe 8 to be heated, the element 7 is bonded onto the frame 8 by solder 4. Through these procedures, the cost of bonding material can be cut down remarkably by eliminating the consumption of gold as the bonding material.
申请公布号 JPS6393119(A) 申请公布日期 1988.04.23
申请号 JP19860239711 申请日期 1986.10.07
申请人 NEC CORP 发明人 SAKAUCHI HIDEO
分类号 H01L21/52 主分类号 H01L21/52
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