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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6392030(A)
申请公布日期
1988.04.22
申请号
JP19860237502
申请日期
1986.10.06
申请人
TOSHIBA CORP
发明人
WAKATSUKI MAKIKO;MATSUSHITA YOSHIAKI
分类号
H01L21/322;H01L21/265;H01L27/08
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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