| 摘要 |
<p>PURPOSE:To suppress the generation of dust due to sliding, by levitating and moving load with an interaction between a magnetic section fitted on a levitator set in a vacuum vessel, and a permanent magnet for levitation set outside the vacuum vessel. CONSTITUTION:In a vacuum vessel 1, a levitator 5 guided along a carrying pass is set, and on the side section of the levitator 5, a magnetic member 8 is fitted. In the meantime, outside the vacuum vessel 1, a linear shaft 13 is set along the carrying pass, and on the linear shaft 13, the levitator 5 on which a permanent magnet 10, an electromagnet 12, and a position detecting sensor 17 are fitted is moved at an arbitrary speed. By a magnetic force between the magnetic member 8 and the permanent magnet 10, the levitator 5 is levitated. Besides, by controlling the exciting current of the electromagnet 12 according to the detection signal of the position sensor 17, the position of the levitator 5 is controlled.</p> |
