| 摘要 |
PURPOSE:To obtain high repetition rate and large output, by providing pulse gas laser oscillation equipment, amplifying equipment having a plurality of discharge parts for amplifying a laser beam, a detection part for detecting the timing of main discharge, and a controlling part of the discharge timing which is to be applied to a pulse power source. CONSTITUTION:In pulse gas laser oscillation equipment 1, laser beams 2 are obtained with a timing shown in fiqure (a). These laser beams make an incidence from a transmitting window 11a, and pass through two discharge parts 21 and 22. At the time of passing, the discharge parts 21 and 22 repeat alternately discharging 31 and 32 based on a control operation from a controlling part 27 in the manner in which synchronization with the timing shown in figures (b) and (c) respectively, that is, the oscillation timing of the laser beams 2 is kept. The pulse laser is successively synchronized with the discharge in such amplifying equipment 3 and amplified. As the result, the amplified output 23 (laser beam) shown in figure (d) is emitted from a transmitting window 116. After repeating operation in a small sized oscillation part, a large output laser with high repetition rate can be obtained by high output amplification. |
