MANUFACTURE OF SEMICONDUCTOR SUBSTRATE,申请号JP19860235370-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPS6390141(A)	申请公布日期	1988.04.21
申请号	JP19860235370	申请日期	1986.10.02
申请人	SONY CORP	发明人	IZAWA NOBUYUKI;SUZUKI TOSHIHIKO
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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