| 摘要 |
PURPOSE:To measure the line width and line interval of a pattern on a material without knowing work distance by using two deflectors for a length measuring method which uses an electrifying beam. CONSTITUTION:The deflectors 5 and 6 are provided on, and above and below an optical axis Z. A scanning signal is sent to only the deflector 5 to scan the beam on the material 4 from the optical axis Z to left. At this time, an angle theta1 of deflection is calculated from a reflected signal from an edge of the pattern P0. Then only the deflector 6 is operated similarly to calculate an angle theta2 of deflection. Consequently, the distance l1 from the optical axis Z to the left edge of the pattern P0 is found. Similarly, the beam is scanned from the optical axis Z to right to calculate the distance l2 from the optical axis Z to the right edge of the pattern P0. From the distance l1+l2, the line width of the pattern P0 is calculated. Thus, the line width and line interval of the pattern are measured without knowing work distance. |
