发明名称 VIA FILLING OF GREEN CERAMIC TAPE
摘要 A process for filling vias in a sheet of dielectric tape for use in fabricating hybrid multilayer circuit structures. The process includes the steps of securing a sheet of dielectric tape (11) comprising a dielectric layer and a supporting carrier layer to a frame (13), forming vias (19) in the dielectric tape, securing the frame with the dielectric tape to a via filling fixture (17), filling the vias with via fill metallization, and removing the dielectric tape from the via filling fixture. The process further contemplates filling vias of dielectric tape secured directly to an exposed surface of a hybrid circuit during the manufacturing process.
申请公布号 WO8802928(A1) 申请公布日期 1988.04.21
申请号 WO1987US02092 申请日期 1987.08.24
申请人 HUGHES AIRCRAFT COMPANY 发明人 OPINA, PATRICIA, B.
分类号 H01L21/48;H05K1/03;H05K1/09;H05K3/40;(IPC1-7):H01L21/48 主分类号 H01L21/48
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