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发明名称	POSITION DETECTION SYSTEM
摘要
申请公布号	JPS6390900(A)	申请公布日期	1988.04.21
申请号	JP19860236004	申请日期	1986.10.03
申请人	HITACHI ELECTRONICS ENG CO LTD	发明人	YAMAHA TSUNEO
分类号	H01L21/66;H01L21/68;H05K13/04	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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