| 摘要 |
PURPOSE:To provide a high precision and small size as well as simplified and inexpensive manufacture to an optical device adapted for reflecting the light from a light emitting element to the exterior by means of a prism and guiding the light returning from the exterior to a photo detector by means of the prism by integrally forming the prism, photo detector and light emitting element using a crystal as the material. CONSTITUTION:A groove 4 having a 'V'-shaped cross section is formed in the intermediate part of the surface of a transparent crystal substrate 1, and one side of the groove 4 of the crystal substrate 1 is made into a prism 7 having one or a plurality of photo detectors 9-11 formed on the surface or the side thereof. Also, the surface 14 of the other side of the rear groove 4 is made lower than the height of the surface 2 of the one side, and on the surface 14, a light emitting element 15 for emitting a light directing to the prism 7 is integrally formed. For instance, in the intermediate part of the surface 2 of a crystal substrate 1 made of n-type A GaAs, a groove 4 having a 'V'-shaped cross section is formed by means of an anisotropical etching, and photo diodes 9-11 are formed in the rear side 3 of the prism 7 on the left of the groove 4. Further, as to a light emitting element forming section 13 on the right, the height of the surface 14 is made lower than that of the surface 2, and on the surface 14 a laser diode 15 is formed. |
