VAPOR PHASE CRYSTAL GROWTH SYSTEM,申请号JP19860234324-传众专利搜索

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发明名称	VAPOR PHASE CRYSTAL GROWTH SYSTEM
摘要
申请公布号	JPS6390121(A)	申请公布日期	1988.04.21
申请号	JP19860234324	申请日期	1986.10.03
申请人	TOSHIBA CORP	发明人	SUHARA MOTOI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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