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发明名称
POSITIONER FOR SUBSTRATE
摘要
申请公布号
JPS6389243(A)
申请公布日期
1988.04.20
申请号
JP19860232121
申请日期
1986.09.30
申请人
TOSHIBA CORP
发明人
SUGA MIKIO;KOMARU MINORU
分类号
B23Q3/18;H05K13/04
主分类号
B23Q3/18
代理机构
代理人
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