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经营范围
发明名称
MAGNETIC FIELD EXCITATION TYPE CVD DEVICE
摘要
申请公布号
JPS6389671(A)
申请公布日期
1988.04.20
申请号
JP19860234296
申请日期
1986.10.03
申请人
ULVAC CORP
发明人
IZUMI HIROHIKO
分类号
C23C16/50;C23C16/511
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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