| 摘要 |
PURPOSE:To easily obtain a uniform quality of thermo-compress bonded products by using a thermocompression bonding device having a first closed chamber and second closed chamber surrounding the first closed chamber and capable of an exact and good hot pressing by the difference in the pressures between the chambers. CONSTITUTION:An object W to be processed is set in a first closed wall section 17 on a lower press board 13 and the first and second closed chambers 20 and 21 formed respectively with a flexible sheet 19 and an upper press board 12 are concurrently evacuated. The upper and lower press boards 12 and 13 are heated to a given temperature by heaters 16a and 16b, and while the closed chamber 20 is evacuated, the evacuation of the chamber 21 is stopped, and a fluid is introduced into the chamber 21 through an air supply and discharge hole 23. The object W to be processed is thermo-compress bonded through the sheet 19 by the difference in pressures between the chamber 21 filled with fluid and the evacuated chamber 20. |
