| 摘要 |
PURPOSE:To simplify the structure and to reduce the cost by dividedly providing lower electrodes to a piece of piezoelectric body. CONSTITUTION:A piezoelectric actuator is composed of a piece of rectangular plate piezoelectric body 1, an upper electrode film 2 of several mum in thickness coated onto its upper surface, three lower electrode films 3-5 of several mum in thickness separated in equal intervals each other along the arrowheaded directions M and N and coated onto the undersurface of the piezoelectric body 1, a pair of leg body 6 to support the piezoelectric body 1, a rectangular plate elastic body 7 secured onto the upper electrode film 2, a driving power source 8 and a moving piece 10. By the way, a stator 9 is formed by the piezoelectric body 1, leg body 6 and elastic body 7. A moving piece 10 is fixedly put on the elastic body 7. Across the upper electrode film 2 and the lower electrode films 3-5 driving voltage with the phase deviated each other is applied. As a result, the elastic body 7 generates travelling waves propagated in the arrowheaded direction M and displaces the moving piece 10 in the arrowheaded direction N. |
