发明名称 |
Integrated ambient sensing devices and methods of manufacture |
摘要 |
An ambient sensing device is described especially suited to the sensing of a variety of ambient parameters. Photolithographic techniques are used to pattern a multiplicity of sensitive layers on a single monolithic substrate taking into account the wide range of plastic, gelatinous and ceramic materials to be patterned and the problems of their cross-contamination when in contact.
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申请公布号 |
US4739380(A) |
申请公布日期 |
1988.04.19 |
申请号 |
US19840572185 |
申请日期 |
1984.01.19 |
申请人 |
INTEGRATED IONICS, INC. |
发明人 |
LAUKS, IMANTS R.;VAN DER SPIEGEL, JAN |
分类号 |
G01N27/333;G01N27/414;(IPC1-7):H01L29/66;H01L29/96 |
主分类号 |
G01N27/333 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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