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发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPS6388821(A)
申请公布日期
1988.04.19
申请号
JP19860233332
申请日期
1986.10.02
申请人
SONY CORP
发明人
NODA JITSUYA;SATO JUNICHI;MORITA YASUSHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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