发明名称 |
MANUFACTURE OF ION INDUCTION FIELD-EFFECT TRANSISTOR |
摘要 |
The invention relates to a process for manufacturing a REFET and/or CHEMFET, comprising: a) covalent bonding of a hydrophilic polymer layer to an isolator layer applied to a semiconductor material; b) the absorption of water or a watery solution into said hydrophilic polymer layer; and c) the binding of a hydrophobic polymer layer to the water holding hydrophilic polymer layer. It is advantageous that this water holding hydrophilic polymer layer also contains an electrolyte and/or a buffer. Preferably an ion to be measured with the CHEMFET also forms part of the electrolyte. |
申请公布号 |
JPS6388439(A) |
申请公布日期 |
1988.04.19 |
申请号 |
JP19870222874 |
申请日期 |
1987.09.04 |
申请人 |
SUTEIKUTOCHINGU SENTORIYUUMU BOOLE MICRO EREKUTORONIKA TOBENTE |
发明人 |
SADOHERUTERU ERUNSUTO YAN ROBERUTO;SUKAURONSUKA PUTASHINSUKA MARIA DANUTA;FUAN DERU UERU PEETERU DAUE;FUAN DEN BERUKU ARUBERUTO;REINHAUTO DEBITSUTO NIKORAASU |
分类号 |
G01N27/00;G01N27/30;G01N27/414;H01L29/78 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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