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发明名称
ION SOURCE
摘要
申请公布号
JPS6386864(A)
申请公布日期
1988.04.18
申请号
JP19860230829
申请日期
1986.09.29
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MATSUOKA SHIGETO;ONO KENICHI
分类号
C23C14/32;C23C14/34;C23F4/00;H01J27/08;H01J27/18;H01J37/08;H01L21/203
主分类号
C23C14/32
代理机构
代理人
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地址
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