| 摘要 |
PURPOSE:To hold a plate-like body in a non-contact manner by means of a high hold force, by providing a holding body, having a holding surface, which serves to form a plane-like gap between the plate-like body and the holding body. CONSTITUTION:A valve device 8D of a fluid feed source 8 and a valve device 12D of a fluid suction source 12 are brought into an opening state to actuate a holding mechanism. When, with this state, a device frame 13 is lowered and is caused to approach a plate-like body 1, since a holding body 2 is movable to a device frame 13 through the force of a spring-like body 14, a proper gap (h) is automatically formed and held between a holding surface 2A of the holding body 2 and an upper surface 1A of the plate-like body 1 by means of a fluid force. When the held plate-like body 1 is placed on a plane, only suction of fluid is stopped, and a device frame 13 is raised. After the plate-like body 1 is separated from a device, the feed of fluid is also stopped. |
